Browsing by Author "Sagi, K.V."

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Chemical mechanical polishing and planarization of Mn-based barrier/Ru liner films in Cu interconnects for advanced metallization nodes

Sagi, K.V.
;
Teugels, Lieve
;
van der Veen, Marleen
;
Struyf, Herbert
;
Babu, S.V.
Journal article
2017, ECS Journal of Solid State Science and Technology, (6) 5, p.P259-P264
Chemical mechanical polishing of chemical vapor deposited Co films with minimal corrosion in the Cu/Co/Mn/SiCOH patterned structures

Sagi, K.V.
;
Teugels, Lieve
;
van der Veen, Marleen
;
Struyf, Herbert
;
Alety, S.R.
;
Babu, S.V.
Journal article
2017, ECS Journal of Solid State Science and Technology, (6) 5, p.P276-P283
Investigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosion

Sagi, K.V.
;
Amanapu, H.P.
;
Teugels, Lieve
;
Babu, S.V.
Journal article
2014, ECS Journal of Solid State Science and Technology, (3) 7, p.P227-P234