Browsing by Author "Sajavaara, T."
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Publication Characterization of high and low dielectrica using low Energy Time of Flight Elastic Recoil Detection
Publication Considerations about multiple and plural scattering in heavy-ion low-energy ERDA
Journal article2009, Nuclear Instruments and Methods in Physics Research B, (267) 11, p.1936-1941Publication Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer
Publication Depth resolution optimization and role of multiple scattering in low-energy TOF-ERDA
Oral presentation2007, International Workshop on High-Resolution Depth ProfilingPublication Depth resolution optimization for low-energy ERDA
Journal article2007, Nuclear Instruments and Methods in Physics Research B, (261) 1_2, p.512-515Publication Growth and characterization of atomic layer deposited WCxNy
Publication Potentialities and limitations of low-energy TOF-ERDA for high resolution and quantitative profiling of thin films
Oral presentation2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and ModelingPublication Time-of-flight telescope for heavy-ion RBS
Journal article2007, Nuclear Instruments and Methods in Physics Research B, (261) 1_2, p.529-533