Browsing by Author "Santoro, G."
Now showing 1 - 3 of 3
- Results per page
- Sort Options
Publication 300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124961XPublication 3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation
Proceedings paper2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.1342612-1Publication Wafer-scale characterization for two-dimensional material layers
Journal article review2024-MAR 1, JAPANESE JOURNAL OF APPLIED PHYSICS, (63) 3, p.030802