Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
Publication:
300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
Date
2023
Proceedings Paper
https://doi.org/10.1117/12.2657968
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
Accepted version
757.33 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Moussa, Alain
;
Bogdanowicz, Janusz
;
Groven, Benjamin
;
Morin, Pierre
;
Beggiato, Matteo
;
Saib, Mohamed
;
Santoro, G.
;
Abramovitz, Y.
;
Houchens, K.
;
Ben Nissim, S.
;
Meir, N.
;
Hung, J.
;
Urbanowicz, A.
;
Koret, R.
;
Turovets, I.
;
Lorusso, Gian
;
Charley, Anne-Laure
Journal
Proceedings of SPIE
Abstract
Description
Metrics
Downloads
189
since deposited on 2024-04-17
131
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Views
857
since deposited on 2024-04-17
426
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Downloads
189
since deposited on 2024-04-17
131
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Views
857
since deposited on 2024-04-17
426
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations