Publication:

300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2657968
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Author(s)

Moussa, Alain  
;
Bogdanowicz, Janusz  
;
Groven, Benjamin  
;
Morin, Pierre  
;
Beggiato, Matteo  
;
Saib, Mohamed  
;
Santoro, G.
;
Abramovitz, Y.
;
Houchens, K.
;
Ben Nissim, S.
;
Meir, N.
;
Hung, J.
;
Urbanowicz, A.
;
Koret, R.
;
Turovets, I.
;
Lorusso, Gian  
;
Charley, Anne-Laure  

Journal

Proceedings of SPIE

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497 since deposited on 2024-04-17
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862 since deposited on 2024-04-17
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Acq. date: 2026-04-08

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