Publication:

300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2657968
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dc.contributor.authorMoussa, Alain
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorGroven, Benjamin
dc.contributor.authorMorin, Pierre
dc.contributor.authorBeggiato, Matteo
dc.contributor.authorSaib, Mohamed
dc.contributor.authorSantoro, G.
dc.contributor.authorAbramovitz, Y.
dc.contributor.authorHouchens, K.
dc.contributor.authorBen Nissim, S.
dc.contributor.authorMeir, N.
dc.contributor.authorHung, J.
dc.contributor.authorUrbanowicz, A.
dc.contributor.authorKoret, R.
dc.contributor.authorTurovets, I.
dc.contributor.authorLorusso, Gian
dc.contributor.authorCharley, Anne-Laure
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorMorin, Pierre
dc.contributor.imecauthorBeggiato, Matteo
dc.contributor.imecauthorSaib, Mohamed
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.orcidextUrbanowicz, A.::0000-0002-2769-452X
dc.contributor.orcidimecMoussa, Alain::0000-0002-6377-4199
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecBeggiato, Matteo::0000-0003-0873-9021
dc.contributor.orcidimecSaib, Mohamed::0000-0002-5153-5553
dc.contributor.orcidimecLorusso, Gian::0000-0003-3498-5082
dc.contributor.orcidimecCharley, Anne-Laure::0000-0003-4745-0167
dc.date.accessioned2024-04-17T10:03:21Z
dc.date.available2024-04-17T10:03:21Z
dc.date.embargo2023-03-31
dc.date.issued2023
dc.identifier.doi10.1117/12.2657968
dc.identifier.eisbn978-1-5106-6100-4
dc.identifier.isbn978-1-5106-6099-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43846
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 124961X
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVII
dc.source.conferencedateFEB 27-MAR 02, 2023
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages7
dc.source.volume12496
dc.title

300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials

dc.typeProceedings paper
dspace.entity.typePublication
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