Browsing by Author "Sanuki, Hideaki"
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Publication Development on main chain scission resists for high-NA EUV lithography
Proceedings paper2023, Conference on Advances in Patterning Materials and Processes XL, FEB 27-MAR 01, 2023, p.Art. 1249807Publication Update on main chain scission resists in Zeon for high-NA EUV lithography
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023