Update on main chain scission resists in Zeon for high-NA EUV lithography

Publication:

2023

Proceedings Paper

Author(s)

Shirotori, Akihide

;

;

;

;

;

;

;

Proceedings of SPIE

910 since deposited on 2024-01-13

7last month

1last week

Acq. date: 2026-08-10