Publication:

Update on main chain scission resists in Zeon for high-NA EUV lithography

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2686602
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Author(s)

Shirotori, Akihide
;
Oda, Yuji
;
Taguchi, Kazunori
;
Yeh, Sin Fu  
;
Suh, Hyo Seon  
;
De Simone, Danilo  
;
Vandenberghe, Geert  
;
Sanuki, Hideaki

Journal

Proceedings of SPIE

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902 since deposited on 2024-01-13
Acq. date: 2025-10-25

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902 since deposited on 2024-01-13
Acq. date: 2025-10-25

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