Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Sarkar, T."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Dry Etch Challenges for Patterning Middle-of-line (MOL) Contact Trench in Monolithic CFET (complementary FET)

    Sarkar, T.
    ;
    Radisic, Dunja  
    ;
    Vega Gonzalez, Victor  
    ;
    Stiers, Karen  
    ;
    Sheng, C.
    Proceedings paper
    2024, Conference on Advanced Etch Technology and Process Integration for Nanopatterning XIII, 2024-02-25, p.129590B

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings