Browsing by Author "Sarkar, T."
Now showing 1 - 3 of 3
- Results per page
- Sort Options
Publication Addressing Integration Challenges in Direct Backside Contact of CFET
Proceedings paper2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02Publication Addressing Integration Challenges in Direct Backside Contact of CFET
Proceedings paper2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02Publication Dry Etch Challenges for Patterning Middle-of-line (MOL) Contact Trench in Monolithic CFET (complementary FET)
Proceedings paper2024, Conference on Advanced Etch Technology and Process Integration for Nanopatterning XIII, 2024-02-25, p.129590B