Browsing by Author "Sarstedt, Margit"
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Publication Exploring capabilities of electrical linewidth measurement (ELM) techniques
Journal article2001, Microelectronic Engineering, (57-58) 1_4, p.673-681Publication Metrology method for the correlation of line edge roughness for different resists before and after etch
Oral presentation2000, MNE; 18-21 September 2000; Jena, Germany.Publication Metrology method for the correlation of line edge roughness for different resists before and after etch
Journal article2001, Microelectronic Engineering, (57-58) 1_4, p.665-672