Publication:
Metrology method for the correlation of line edge roughness for different resists before and after etch
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1936 since deposited on 2021-10-14
2last month
Acq. date: 2025-12-13
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Metrics
Views
1936 since deposited on 2021-10-14
2last month
Acq. date: 2025-12-13
Citations