Metrology method for the correlation of line edge roughness for different resists before and after etch

dc.contributor.author	Winkelmeier, Stephanie
dc.contributor.author	Sarstedt, Margit
dc.contributor.author	Ercken, Monique
dc.contributor.author	Goethals, Mieke
dc.contributor.author	Ronse, Kurt
dc.contributor.imecauthor	Ercken, Monique
dc.contributor.imecauthor	Ronse, Kurt
dc.contributor.orcidimec	Ronse, Kurt::0000-0003-0803-4267
dc.date.accessioned	2021-10-14T14:19:31Z
dc.date.available	2021-10-14T14:19:31Z
dc.date.issued	2000
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4943
dc.source.conference	MNE; 18-21 September 2000; Jena, Germany.
dc.source.conferencelocation
dc.title	Metrology method for the correlation of line edge roughness for different resists before and after etch
dc.type	Oral presentation
dspace.entity.type	Publication
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