Browsing by Author "Savage, Travis"
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Publication Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials
Meeting abstract2014, AVS 61st International Symposium and Exhibition, 9/11/2014, p.EM-TuM-6Publication Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
Journal article2015, Microelectronic Engineering, 137, p.75-78Publication Ultra-low damage integration of k= 2.3 periodic mesoporous oxide dielectric material using cryogenic etching
Meeting abstract2014, MRS Spring Meeting Symposium CC: New Materials and Processes for Interconnects, Novel Memory and Advanced Display Technologies, 21/04/2014, p.CC1.04