imec Institutional Repository Browsing {{ collection }} by Author "Schmidt, Michael"

Publication

Clustered single wafer wet cleaning

Mertens, Paul

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Holsteyns, Frank

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Vos, Rita

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Vereecke, Guy

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Fyen, Wim

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Lauerhaas, Jeff

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Xu, Kaidong

Meeting abstract

2002, 201st Meeting of the Electrochemical Society. Rapid Thermal and Other Short Time Processing Technologies III, 12/05/2002, p.699

Publication

Correlation between barrier integrity and TDDB performance of copper porous low-k interconnects

Tokei, Zsolt

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Patz, Matthias

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Schmidt, Michael

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Iacopi, Francesca

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Demuynck, Steven

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Maex, Karen

Journal article

2004, Microelectronic Engineering, (76) 1_4, p.70-75

Publication

Recent advances in wafer cleaning

Mertens, Paul

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Vos, Rita

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Bearda, Twan

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Maes, Marjan

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Lauerhaas, Jeff

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Loewenstein, Lee

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Fyen, Wim

Proceedings paper

2001, Proceedings SEMI Front End Technology Conference, 24/04/2001

Publication

Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson Highlands chamber

Mannaert, Geert

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Van Cauwenberghe, M.

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Schmidt, Michael

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Van Aelst, Joke

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Hendrickx, Dirk

Oral presentation

2002, UCPSS - Ultra Clean Processing Technology Symposium

Browsing by Author "Schmidt, Michael"