Browsing by Author "Schreutelkamp, R."
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Publication Study of dopant diffusion and defect evolution for advanced ultra shallow junctions based on atomistic kinetic monte carlo approach
Proceedings paper2007, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 18/09/2007, p.712-713Publication Ultra-shallow junctions formed by C co-implantation with spkie plus sub-melt laser annealing
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.281-285