Browsing by Author "Schreutelkamp, Robert"
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Publication Junction anneal sequence optimization for advanced high-k / metal gate CMOS technology
Proceedings paper2009, 9th International Workshop on Junction Technology - IWJT, 11/06/2009Publication Performance enhancement of PFET planar devices by plasma immersion ion implantation (P3i)
Proceedings paper2008, 17th International Conference on Ion Implantation Technology - IIT, 8/06/2008, p.465-468