Publication:

Junction anneal sequence optimization for advanced high-k / metal gate CMOS technology

Date

2009

Proceedings Paper

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Author(s)

Ortolland, Claude

;

Ragnarsson, Lars-Ake

;

Kerner, Christoph

;

Chiarella, Thomas

;

;

Okuno, Yasutoshi

;

;

Richard, Olivier

;

Everaert, Jean-Luc

;

;

Kubicek, Stefan

;

Absil, Philippe

;

Biesemans, Serge

;

Schreutelkamp, Robert

;

Hoffmann, Thomas Y.

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1978 since deposited on 2021-10-18

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Acq. date: 2026-08-20