Publication:

Junction anneal sequence optimization for advanced high-k / metal gate CMOS technology

Date

2009
Proceedings Paper
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Author(s)

Ortolland, Claude
;
Ragnarsson, Lars-Ake  
;
Kerner, Christoph  
;
Chiarella, Thomas  
;
Rosseel, Erik  
;
Okuno, Yasutoshi
;
Favia, Paola  
;
Richard, Olivier  
;
Everaert, Jean-Luc
;
Schram, Tom  
;
Kubicek, Stefan  
;
Absil, Philippe  
;
Biesemans, Serge  
;
Schreutelkamp, Robert
;
Hoffmann, Thomas Y.

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Abstract

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