Browsing by Author "Schulz, S. E."

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Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-K SiO2 xerogel films

Murray, C.
;
Flannery, C.
;
Streiter, I.
;
Schulz, S. E.
;
Baklanov, Mikhaïl
;
Mogilnikov, K. P.
Journal article
2002, Microelectronic Engineering, (60) 1_2, p.133-141
Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films

Murray, C.
;
Flannery, C.
;
Streiter, I.
;
Schulz, S. E.
;
Baklanov, Mikhaïl
;
Mogilnikov, K. P.
Oral presentation
2001, MAM - European Workshop on Materials for Advanced Metallization; 5-7 March 2001; Sigtuna, Sweden.
Ellipsometric study of the change in the porosity of silica xerogels after surface chemical modification with hexamethyldisilizane

Himcinschi, C.
;
Friedrich, M.
;
Frühauf, S.
;
Streiter, I.
;
Schulz, S. E.
;
Gessner, T.
Oral presentation
2001, 11. Tagung Festkörperanalytik. 11th Conference on Solid State Analytics; 25-28 June 2001; Chemnitz.
Thin-film aerogel porosity and stiffness characterised by Surface Acoustic Wave Spectroscopy

Flannery, C. M.
;
Murray, C.
;
Baklanov, Mikhaïl
;
Streiter, I.
;
Schulz, S. E.
Oral presentation
2001, MRS Spring; 2001; San Francisco, CA, USA.