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Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films
Publication:
Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films
Date
2001
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Murray, C.
;
Flannery, C.
;
Streiter, I.
;
Schulz, S. E.
;
Baklanov, Mikhaïl
;
Mogilnikov, K. P.
;
Himcinschi, C.
;
Friedrich, M.
;
Zahn, D. R. T.
;
Gessner, T.
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1965
since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations
Metrics
Views
1965
since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations