Publication:
Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films
Date
| dc.contributor.author | Murray, C. | |
| dc.contributor.author | Flannery, C. | |
| dc.contributor.author | Streiter, I. | |
| dc.contributor.author | Schulz, S. E. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Mogilnikov, K. P. | |
| dc.contributor.author | Himcinschi, C. | |
| dc.contributor.author | Friedrich, M. | |
| dc.contributor.author | Zahn, D. R. T. | |
| dc.contributor.author | Gessner, T. | |
| dc.date.accessioned | 2021-10-14T17:24:04Z | |
| dc.date.available | 2021-10-14T17:24:04Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5501 | |
| dc.source.conference | MAM - European Workshop on Materials for Advanced Metallization; 5-7 March 2001; Sigtuna, Sweden. | |
| dc.source.conferencelocation | ||
| dc.title | Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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