Browsing by Author "Schwitters, M."
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Publication A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling
; ; Maes, DavidJournal article2005-04, IEEE Trans. Electron Devices, (52) 4, p.447-453Publication Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
Oral presentation2004, The 16th International Symposium on Integrated FerroelectricsPublication Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Oral presentation2004, International Symposium on Integrated FerroelectricsPublication Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors
Oral presentation2004, Journées Couches Ferroelectriques - JCFPublication Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology
Journal article2004, Integrated Ferroelectrics, 66, p.71-83Publication Microstructural characterization of side walls in SBT 3D capacitors
Oral presentation2004, 16th International Symposium on Integrated FerroelectricsPublication Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 films
Oral presentation2004, The 16th International Symposium on Integrated FerroelectricsPublication Side walls contribution in integrated 3D SBT-based capacitors: electrical and microstructural point of view
Oral presentation2004, E-MRS Spring Meeting Symposium D: Functional Oxides for Advanced Semiconductor TechnologiesPublication Stress evolution in integrated SrBi2Ta2O9 ferroelectric layers
Proceedings paper2004, Ferroelectric Thin Films XII, 1/12/2003, p.3-8