Browsing by Author "Sengoku, Naohisa"
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Publication Defect profiling and the role of nitrogen in lanthanum oxide-capped high-k dielectrics for nMOS applications
Proceedings paper2008-09, International Conference on Solid State Devices and Materials - SSDM, 24/09/2008, p.680-681Publication Thermally-stable high effective work function TaCN thin films for metal gate electrode applications
Journal article2009, Journal of Applied Physics, (105) 5, p.53516