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Browsing by Author "Serrano, J. J."

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    Simulation of the initial transient of the Si+ and O+ signals from oxygen sputtered silicon by means of independent models on sputtering and secondary ionization

    Serrano, J. J.
    ;
    De Witte, Hilde
    ;
    Vandervorst, Wilfried  
    ;
    Guzman, B.
    ;
    Blanco, J. M.
    Journal article
    2001, Journal of Applied Physics, (89) 9, p.5191-5198
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    Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atom

    Serrano, J. J.
    ;
    Blanco, J. M.
    ;
    Guzman, B.
    ;
    De Witte, Hilde
    ;
    Vandervorst, Wilfried  
    Journal article
    2001, Journal of Applied Physics, (90) 9, p.4456-4466

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