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Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atom
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Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atom
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Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Serrano, J. J.
;
Blanco, J. M.
;
Guzman, B.
;
De Witte, Hilde
;
Vandervorst, Wilfried
Journal
Journal of Applied Physics
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1881
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1881
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-16
Citations