Browsing by Author "Shehzad, Atif"
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Publication Exploring the readiness of EUV photo materials for patterning
Proceedings paper2017, Extreme Ultraviolet (EUV) Lithography VIII, 26/02/2017, p.101430RPublication Photoresist absorption measurement at extreme ultraviolet (EUV) wavelength by thin film transmission method
Journal article2019, Journal of Photopolymer Science and Technology, (32) 1, p.57-66