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Browsing by Author "Shehzad, Atif"

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    Exploring the readiness of EUV photo materials for patterning

    De Simone, Danilo  
    ;
    Vesters, Yannick
    ;
    Shehzad, Atif
    ;
    Vandenberghe, Geert  
    ;
    Foubert, Philippe  
    Proceedings paper
    2017, Extreme Ultraviolet (EUV) Lithography VIII, 26/02/2017, p.101430R
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    Photoresist absorption measurement at extreme ultraviolet (EUV) wavelength by thin film transmission method

    Vesters, Yannick
    ;
    Shehzad, Atif
    ;
    De Simone, Danilo  
    ;
    Pollentier, Ivan  
    ;
    Nannarone, Stefano
    Journal article
    2019, Journal of Photopolymer Science and Technology, (32) 1, p.57-66

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