Browsing by Author "Sheng, C."
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Publication Dry Etch Challenges for Patterning Middle-of-line (MOL) Contact Trench in Monolithic CFET (complementary FET)
Proceedings paper2024, Conference on Advanced Etch Technology and Process Integration for Nanopatterning XIII, 2024-02-25, p.129590BPublication Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFET
Proceedings paper2024, 2024 International Interconnect Technology Conference, 2024-06-03