Browsing by Author "Shimoaoki, Takeshi"
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Publication Manufacturability improvements in EUV resist processing towards NXE:3300 processing
Proceedings paper2014, Advances in Patterning Materials and Processes XXXI, 23/02/2014, p.905108Publication Track processing optimizations for different EUV resist platforms: preparing for a 3300 baseline process
Proceedings paper2013, Extreme Ultraviolet (EUV) Lithography IV, 24/02/2013, p.86792T