imec Institutional Repository Browsing {{ collection }} by Author "Skorupa, W."

Publication

Millisecond flash lamp annealing of shallow implanted layers in Ge

Wündisch, C.

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Posselt, M.

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Schmidt, B.

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Heera, V.

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Schumann, T.

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Mücklich, A.

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Grötzschel, R.

Journal article

2009, Applied Physics Letters, (95) 25, p.252107

Publication

Millisecond flash lamp annealing of ultrashallow implanted layers in Ge

Posselt, M.

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Wündisch, C.

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Schmidt, B.

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Schumann, T.

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Mücklich, A.

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Skorupa, W.

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Clarysse, Trudo

Meeting abstract

2009, 216th ECS Meeting, 4/10/2009, p.2391

Publication

n+ doping of Ge by P or As implantation and flash-lamp annealing

Wündisch, C.

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Posselt, M.

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Anwand, W.

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Schmidt, B.

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Grötzschel, R.

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Mücklich, A.

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Skorupa, W.

Meeting abstract

2008, E-MRS Spring Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, 26/05/2008

Publication

Proton irradiation effects in silicon devices

Simoen, Eddy

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Vanhellemont, Jan

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Alaerts, André

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Claeys, Cor

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Gaubas, Eugenijus

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Kaniava, Arvydas

Proceedings paper

1997, Recent Progress in Accelerator Beam Application. Proceedings 7th International Symposium on Advanced Nuclear Energy Research, 18/03/1996, p.224-229

Publication

Proton irradiation effects in silicon junction diodes and charge-coupled devices

Simoen, Eddy

;

Vanhellemont, Jan

;

Alaerts, André

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Claeys, Cor

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Gaubas, Eugenijus

;

Kaniava, Arvydas

Journal article

1997, Radiation Physics and Chemistry, (50) 5, p.417-422

Publication

RTA and FLA of Ultra-shallow implanted layers in Ge

Wündisch, C.

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Posselt, M.

;

Anwand, W.

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Schmidt, B.

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Mücklich, A.

;

Skorupa, W.

;

Clarysse, Trudo

Proceedings paper

2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.245-249

Browsing by Author "Skorupa, W."