imec Institutional Repository Browsing {{ collection }} by Author "Smith, A.J."

Publication

Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctions

Colombeau, B.

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Smith, A.J.

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Cowern, N.E.B.

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Cristiano, F.

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Claverie, A.

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Duffy, Ray

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Pawlak, Bartek

Proceedings paper

2004, Silicon Front-End Junction Formation - Physics and Technology, 12/04/2004, p.C3.6

Publication

Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth

Pawlak, Bartek

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Vandervorst, Wilfried

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Smith, A.J.

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Cowern, Nick E.B.

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Colombeau, B.

Journal article

2005, Applied Physics Letters, (86) 10, p.101913

Publication

Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions

Pawlak, Bartek

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Surdeanu, Radu

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Colombeau, B.

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Smith, A.J.

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Cowern, N.E.B.

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Lindsay, Richard

Journal article

2004, Applied Physics Letters, (84) 12, p.2055-2057

Publication

Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth

Pawlak, Bartek

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Duffy, Ray

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Janssens, Tom

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Vandervorst, Wilfried

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Maex, Karen

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Smith, A.J.

Journal article

2005, Applied Physics Letters, (87) 3, p.031915-1-031915-3

Browsing by Author "Smith, A.J."