Browsing by Author "Soltwisch, V."
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Publication High-precision optical constants characterization of materials in the EUV spectral range: From large research facilities to laboratory-based instruments
Proceedings paper2022, 37th European Mask and Lithography Conference, JUN 20-23, 2022Publication Refined extreme ultraviolet mask stack model
Journal article2021, JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, (38) 4, p.498-503