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Refined extreme ultraviolet mask stack model
Publication:
Refined extreme ultraviolet mask stack model
Date
2021
Journal article
https://doi.org/10.1364/JOSAA.416235
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Refined_extreme_ultraviolet_mask_stack_model
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Makhotkin, Igor
;
Wu, Meiyi
;
Soltwisch, V.
;
Scholze, F.
;
Philipsen, Vicky
Journal
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION
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Downloads
208
since deposited on 2022-02-22
6
last month
3
last week
Acq. date: 2025-12-08
Views
1839
since deposited on 2022-02-22
2
last month
1
last week
Acq. date: 2025-12-08
Citations