Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Refined extreme ultraviolet mask stack model
Publication:
Refined extreme ultraviolet mask stack model
Copy permalink
Date
2021
Journal article
https://doi.org/10.1364/josaa.416235
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
Refined_extreme_ultraviolet_mask_stack_model
1.21 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Makhotkin, Igor
;
Wu, Meiyi
;
Soltwisch, V.
;
Scholze, F.
;
Philipsen, Vicky
Journal
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION
Abstract
Description
Statistics
Downloads
277
since deposited on 2022-02-22
3
last month
3
last week
Acq. date: 2026-07-17
Views
1852
since deposited on 2022-02-22
1
last month
1
last week
Acq. date: 2026-07-17
Citations
Statistics
Downloads
277
since deposited on 2022-02-22
3
last month
3
last week
Acq. date: 2026-07-17
Views
1852
since deposited on 2022-02-22
1
last month
1
last week
Acq. date: 2026-07-17
Citations