Publication:

Refined extreme ultraviolet mask stack model

Date

2021
Journal article
https://doi.org/10.1364/JOSAA.416235
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Refined_extreme_ultraviolet_mask_stack_model 1.21 MB

Author(s)

Makhotkin, Igor  
;
Wu, Meiyi  
;
Soltwisch, V.
;
Scholze, F.
;
Philipsen, Vicky  

Journal

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION

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