Publication:

Refined extreme ultraviolet mask stack model

Date

2021
Journal article
https://doi.org/10.1364/JOSAA.416235
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dc.contributor.authorMakhotkin, Igor
dc.contributor.authorWu, Meiyi
dc.contributor.authorSoltwisch, V.
dc.contributor.authorScholze, F.
dc.contributor.authorPhilipsen, Vicky
dc.contributor.imecauthorMakhotkin, I. A.
dc.contributor.imecauthorWu, M.
dc.contributor.imecauthorPhilipsen, V
dc.contributor.imecauthorMakhotkin, Igor
dc.contributor.imecauthorWu, Meiyi
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.orcidimecPhilipsen, V::0000-0002-2959-432X
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.date.accessioned2022-02-22T10:42:47Z
dc.date.available2022-02-22T10:42:47Z
dc.date.embargo2023-07-16
dc.date.issued2021
dc.identifier.doi10.1364/JOSAA.416235
dc.identifier.issn1084-7529
dc.identifier.pmidMEDLINE:33798178
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38987
dc.publisherOPTICAL SOC AMER
dc.source.beginpage498
dc.source.endpage503
dc.source.issue4
dc.source.journalJOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION
dc.source.numberofpages6
dc.source.volume38
dc.subject.keywordsMULTILAYERS
dc.title

Refined extreme ultraviolet mask stack model

dc.typeJournal article
dspace.entity.typePublication
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