Browsing by Author "Spengler, J."

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A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS

Scheurle, A.
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Fuchs, T.
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Kehr, K.
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Leinenbach, C.
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Kronmueller, S.
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Arias, A.
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Ceballos, J.
Proceedings paper
2007-01, Proceedings IEEE MEMS, 21/01/2007, p.39-42
Processing of MEMS gyroscopes on top of CMOS ICs

Witvrouw, Ann
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Mehta, Anshu
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Verbist, Agnes
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Du Bois, Bert
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Van Aerde, Steven
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Ramos-Martos, J.
Proceedings paper
2005-02, Proceedings International Solid-State Circuits Conference - ISSCC, 6/02/2005, p.88-89