Browsing by Author "Steeneken, P.G."
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Publication A general and simplified method for rapid evolution of electrostatic switches with varying geometries
; ; ;van Beek, J.T.M. ;Rijks, T.G.S.M. ;Steeneken, P.G.Proceedings paper2004, Technical Digest of Eurosensors XVIII, 12/09/2004, p.502-503Publication Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients
Journal article2005, Sensors & Actuators A, 123-124, p.555-562Publication MEMS tunable capacitors and switches for RF applications
;Rijks, T.G.S.M. ;van Beek, J.T.M. ;Steeneken, P.G. ;Ulenaers, M.J.E.van Eerd, P.Proceedings paper2004, Proceedings 24th International Conference on Microelectronics - MIEL, 16/04/2004, p.49-56Publication Operation of RF MEMS switches and relays in shock environments
Proceedings paper2004, 5th Workshop on MEMS for MillimeterWAVE Communications - MEMSWAVE, 30/06/2004, p.F6-F9Publication Parametric modeling of an RF MEMS switch subjected to mechanical shock
; ; ;van Beek, J.T.M. ;Rijks, T.G.S.M. ;Steeneken, P.G.Proceedings paper2004, 15th MicroMechanics Workshop, 5/09/2004, p.253-256Publication The influence of gas damping on the harmonic and transient response of MEMS devices
Proceedings paper2005, 16th MicroMechanics Europe Workshop - MME, 4/09/2005, p.300-303