Publication:

A general and simplified method for rapid evolution of electrostatic switches with varying geometries

Date

2004

Proceedings Paper

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Author(s)

De Coster, Jeroen

;

Tilmans, Harrie

;

van Beek, J.T.M.

;

Rijks, T.G.S.M.

;

Steeneken, P.G.

;

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Acq. date: 2026-02-24