Publication:
A general and simplified method for rapid evolution of electrostatic switches with varying geometries
Date
| dc.contributor.author | De Coster, Jeroen | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.author | van Beek, J.T.M. | |
| dc.contributor.author | Rijks, T.G.S.M. | |
| dc.contributor.author | Steeneken, P.G. | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.imecauthor | De Coster, Jeroen | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-15T13:01:19Z | |
| dc.date.available | 2021-10-15T13:01:19Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8757 | |
| dc.source.beginpage | 502 | |
| dc.source.conference | Technical Digest of Eurosensors XVIII | |
| dc.source.conferencedate | 12/09/2004 | |
| dc.source.conferencelocation | Rome Italy | |
| dc.source.endpage | 503 | |
| dc.title | A general and simplified method for rapid evolution of electrostatic switches with varying geometries | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |