Browsing by Author "Stehlé, J.L."

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Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR)

Sun, L.
;
Defranoux, C.
;
Stehlé, J.L.
;
Boher, P.
;
Evrard, P.
;
Bellandi, E.
;
Bender, Hugo
Proceedings paper
2004, Fundamentals of Novel Oxide/Semiconductor Interfaces, 1/12/2003, p.95-101
High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry

Boher, P.
;
Evrard, P.
;
Defranoux, C.
;
Darragon, A.
;
Sun, Lianchao
;
Fouere, J.C.
;
Stehlé, J.L.
Proceedings paper
2003-12, MRS Fall Meeting Symposium E: Fundamentals of Novel Oxide/Semiconductor Interfaces, 1/12/2003