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Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR)
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1933 since deposited on 2021-10-15
2last month
Acq. date: 2026-05-31
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Statistics
Views
1933 since deposited on 2021-10-15
2last month
Acq. date: 2026-05-31
Citations