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Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR)
Publication:
Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR)
Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sun, L.
;
Defranoux, C.
;
Stehlé, J.L.
;
Boher, P.
;
Evrard, P.
;
Bellandi, E.
;
Bender, Hugo
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1928
since deposited on 2021-10-15
Acq. date: 2025-10-25
Citations
Metrics
Views
1928
since deposited on 2021-10-15
Acq. date: 2025-10-25
Citations