Publication:
Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR)
Date
| dc.contributor.author | Sun, L. | |
| dc.contributor.author | Defranoux, C. | |
| dc.contributor.author | Stehlé, J.L. | |
| dc.contributor.author | Boher, P. | |
| dc.contributor.author | Evrard, P. | |
| dc.contributor.author | Bellandi, E. | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-15T16:30:54Z | |
| dc.date.available | 2021-10-15T16:30:54Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9652 | |
| dc.source.beginpage | 95 | |
| dc.source.conference | Fundamentals of Novel Oxide/Semiconductor Interfaces | |
| dc.source.conferencedate | 1/12/2003 | |
| dc.source.conferencelocation | Boston, MA USA | |
| dc.source.endpage | 101 | |
| dc.title | Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR) | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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