Browsing by Author "Storck, P."
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Publication 15nm-WFIN high-performance low-defectivity strained-germanium pFinFETs with low temperature STI-last process
Proceedings paper2014, Symposium on VLSI Technology, 9/06/2014, p.138-139Publication Epitaxial Growth of Active Si on Top of SiGe Etch Stop Layer in View of 3D Device Integration
Journal article2021, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, (10) 1, p.014001Publication Strained silicon-on-insulator : fabrication and characterization