Browsing by Author "Storm, Arjen"
Now showing 1 - 4 of 4
- Results Per Page
- Sort Options
Publication A new HF vapor native oxide removal process for cluster applications
Proceedings paper1998, Proceedings of the Symposium on Contamination Free Manufacturing for Semiconductor Manufacturing; SEMICON West, 13/07/1998, p.J1-J10Publication A new HF vapor process for native oxide removal, suited for cluster applications
; ; ; Publication Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods
; ; ; ; Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods
; ; ; ; Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.237-240