Browsing by Author "Strauss, Michael"
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Publication Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices
Publication Scatterometry and AFM measurement combination for area selective deposition process characterization
Proceedings paper2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109591NPublication Statistical significance of STEM based metrology on advanced 3D transistor structures
Proceedings paper2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109590C