Browsing by Author "Sullivan, C."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Journal article2002, Microelectronic Engineering, (64) 1_4, p.351-360Publication Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Proceedings paper2002, Advanced Metallization Conference 2001, 9/10/2001, p.273-278