Browsing by Author "Sundarrajan, A."
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Publication Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures
; ; ; ; Meeting abstract2008, Advanced Metallization Conference - AMC, 23/09/2008Publication Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures
; ; ; ; Proceedings paper2009, Advanced Metallization Conference 2008 (AMC2008), 23/09/2008, p.91-97