Browsing by Author "Suri, Mayur"

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Defect source analysis of directed self-assembly process

Rincon Delgadillo, Paulina
;
Suri, Mayur
;
Durant, Stephane
;
Cross, Andrew
;
Nagaswami, Venkat
Journal article
2013, Journal of Micro/Nanolithography MEMS and MOEMS, (12) 3, p.31112
Defect source analysis of directed self-assembly process (DSA of DSA)

Rincon Delgadillo, Paulina
;
Harukawa, Ryota
;
Suri, Mayur
;
Durant, Stephane
;
Cross, Andrew
Proceedings paper
2013, Alternative Lithographic Technologies V, 24/02/2013, p.86800L