Browsing by Author "Suzuki, Tatsunobu"
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Publication Selective Si Etchant for Gate-All-Around Transistors with Si1-xGex Channel
Meeting abstract2021, Surface Preparation and Cleaning Conference (SPCC), 2021Publication Si1-xGex selective etchant for gate-all-around transistors
Proceedings paper2021, International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS, 22/09/2020, p.71-78