Browsing by Author "Takamasu, Kiyoshi"
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Publication Line profile measurement of advanced-FinFET features by reference metrology
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.942406Publication Linewidth and roughness measurement of SAOP by using FIB and planer-TEM as reference metrology
Proceedings paper2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109590Q