Browsing by Author "Tam, Aviram"

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Enabling Non-Actinic EUV Mask Inspection using CNT Pellicle

Keshet, Mor
;
Gershon, Dor
;
Malul, Uriel
;
Blinder, Yaniv
;
Orr, Yonatan
;
Tam, Aviram
Proceedings paper
2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.1160910
Recess metrology challenges for 3D device architectures in advanced technology nodes

Santoro, Gaetano
;
Houchens, Kevin
;
Bogdanowicz, Janusz
;
Elizov, Moshe
;
Yaron, Lior
Proceedings paper
2022, Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference, FEB 24-MAY 27, 2022, p.120530L