Publication:

Enabling Non-Actinic EUV Mask Inspection using CNT Pellicle

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2584695
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Author(s)

Keshet, Mor
;
Gershon, Dor
;
Malul, Uriel
;
Blinder, Yaniv
;
Orr, Yonatan
;
Tam, Aviram
;
Santoro, Gaetano
;
Houchens, Kevin
;
Gallagher, Emily  
;
Timmermans, Marina  
;
Frommhold, Andreas  
;
Lorusso, Gian  

Journal

Proceedings of SPIE

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1824 since deposited on 2022-03-11
Acq. date: 2025-10-23

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1824 since deposited on 2022-03-11
Acq. date: 2025-10-23

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