Browsing by Author "Tanaka, Shuji"
Now showing 1 - 4 of 4
- Results per page
- Sort Options
Publication Comparison of three methods to measure the internal pressure of empty MEMS packages
Proceedings paper2012, 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA, 2/07/2012Publication Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
Journal article2011, Microelectronics Reliability, (51) 9_11, p.1878-1881Publication Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
Proceedings paper2012, 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA, 2/06/2012, p.1-1Publication Poly-SiGe-based MEMS thin-film encapsulation
; ; ; Journal article2012, Journal of Microelectromechanical Systems, (110) 120, p.21-1