Publication:
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
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1943 since deposited on 2021-10-19
1last month
Acq. date: 2026-01-25
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Statistics
Views
1943 since deposited on 2021-10-19
1last month
Acq. date: 2026-01-25
Citations