Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS

Publication:

2011

Journal article

Author(s)

;

Tanaka, Shuji

;

Guo, Bin

;

;

;

Witvrouw, Ann

;

Wevers, Martine

;

Microelectronics Reliability

1947 since deposited on 2021-10-19

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Acq. date: 2026-04-06